
Optical set up | Infinite-finite conjugates |
---|---|
Max. spatial frequency |
600 lp/mm |
Accuracy MTF on-axis | 0.8 % MTF (up to 350 lp/mm) |
Accuracy MTF off-axis | 1.5 % MTF |
Accuracy EFL (Effective Focal Length) |
4 µm |
Accuracy FFL (Flange Focal Length) |
3 µm |
Measurement time display on axis |
1.3 sec/sample |
Measurement time display all off axis curves |
1.3 sec/sample |
Throughput of samples (Units per hour)* |
2700 UPH |
Measurement points | 49 (25 field positions / cameras) |
Dimensions (height x width x depth) |
1550 mm x 1330 mm x 805 mm |
Weight | 210 kg |
Sample holder / trays | 3 point kinematic mount tray with certified reference flatness |
Sample quality classes | 4 quality classes |
Cleanroom class FS 209 / ISO14644-1 | 100 / ISO 5 |
* 10 seconds for changing trays, 1 tray includes 148 samples
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