| Optical set up | Infinite-finite conjugates |
|---|---|
| Max. spatial frequency |
600 lp/mm |
| Accuracy MTF on-axis | 0.8 % MTF (up to 350 lp/mm) |
| Accuracy MTF off-axis | 1.5 % MTF |
| Accuracy EFL (Effective Focal Length) |
4 µm |
| Accuracy FFL (Flange Focal Length) |
3 µm |
| Measurement time display on axis |
1.3 sec/sample |
| Measurement time display all off axis curves |
1.3 sec/sample |
| Throughput of samples (Units per hour)* |
2700 UPH |
| Measurement points | 49 (25 field positions / cameras) |
| Dimensions (height x width x depth) |
1550 mm x 1330 mm x 805 mm |
| Weight | 210 kg |
| Sample holder / trays | 3 point kinematic mount tray with certified reference flatness |
| Sample quality classes | 4 quality classes |
| Cleanroom class FS 209 / ISO14644-1 | 100 / ISO 5 |
* 10 seconds for changing trays, 1 tray includes 148 samples
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