Type of instrument Table top device with PC and monitor - table optional -
Optical Set-up Infinite-finite conjugates
Max. spatial frequency 600 lp/mm
Accuracy MTF on-axis** 1% MTF (up to 250 lp/mm)
Accuracy MTF off-axis** 2% MTF
Accuracy EFL (Effective Focal Length) 4 μm
Accuracy FFL (Flange Focal Length) 5 μm
Measurement time display on axis 1.5 sec/sample
Measurement time display all axis 1.5 sec/sample
Throughput of samples (Units per hour)* 2340 UPH
DOF - depth of focus*** 3 μm
Image plane tilt*** 0,02°
Azimuth - direction of tilt***
Light source white LED
Filter VIS (NIR Optional) - all filters possible - Standard Photopic Eye Filter -
Measurement points 49 (25 field positions / cameras)
Dimensions (height x width x depth) 905 mm x 620 mm x 650 mm
Weight 92 kg
Size of sample holder / scan table travel Tray 140 mm x 140 mm
Sample holder / trays 3 point kinematic mount tray with certified reference flatness
Sample quality classes 4 quality classes
Cleanroom class FS 209 / ISO14644-1 1000 / ISO 5
ACM Exchangeable Autocollimator
Camera USB 3.0

* 1 tray including 148 samples / tray changing time 5 sec.
** Accuracy is measured on MTF peak values
*** Accuracy depends from sample, sample tilt, number of steps, sample rotation and number of telescopes