µPhase® 500 / 1000 - Most Flexible Interferometer Sensors

These highly integrated phase-shifting Twyman-Green interferometer sensors meet the toughest demands for modern quality management. In combination with the μShape™ measuring and analysis software these high-performance precision measuring instruments provide information about the specimen's surface deviation or wave front aberration.

• Fast and non-destructive single-shot measurements
• High resolution camera
• Easy adaption to different sample reflectivities (µPhase® 1000 only)
• Ability to focus on sample surface (µPhase® 1000 only)
• Second Camera for alignment
• Compact size and modularity
• Robust, dust-proof housing
• Integration in production machines and production lines easily possible
• Standard measuring wavelength 632.8 nm;
  customized versions measuring at wavelengths
  from 355 nm to 1064 nm on request
• Well-structured and comprehensive software supports both production and laboratory use