µPhase® 500 / 1000 - Most Flexible Interferometer Sensors
These highly integrated phase-shifting Twyman-Green interferometer sensors meet the toughest demands for modern quality management. In combination with the μShape™ measuring and analysis software these high-performance precision measuring instruments provide information about the specimen's surface deviation or wave front aberration.
Key Features
- Fast and non-destructive single-shot measurements
- High resolution camera
- Easy adaption to different sample reflectivities (µPhase® 1000 only)
- Ability to focus on sample surface (µPhase® 1000 only)
- Second Camera for alignment
- Compact size and modularity
- Robust, dust-proof housing
- Integration in production machines and production lines easily possible
- Standard measuring wavelength 632.8 nm;
customized versions measuring at wavelengths
from 355 nm to 1064 nm on request - Well-structured and comprehensive software supports both production and laboratory use
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