µPhase® PLANO UP - The Perfect Interferometer for Measuring Flats in Production
These extremely compact and cost effective turnkey interferometers are ideally suited for production. With their small footprint they can be positioned next to the production machine and samples are measured directly after machining. The μPhase® PLANO UP measure flat samples upwards, the sample is positioned on the top of the instrument.
- For measuring flat samples
- various versions for diameters up to 100mm
- Small footprint
- Vibration insensitive
- No re-alignment necessary when measuring series
- Intuitive and easy handling enables usage by unskilled personnel