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WaveSensor®

WaveSensor®

 

Description
 

With the WaveSensor® series a variety of Shack-Hartmann wavefront sensors optimized for different measurement applications is available. The WaveSensor® is integrated into existing laboratory or production setups or used for in-field testing. An additional module which is attached easily to the WaveSensor® allows for the measurement of surface form in reflection.

WaveSensor® is the new Shack-Hartmann sensor developed by TRIOPTICS providing real time wavefront measurement and analysis of spherical and aspherical optics.

With WaveSensor® series highest dynamic range and accuracy are achieved.

Furthermore, WaveSensor® features a compact and robust design thus the sensor can be easily integrated into the customer’s applications. Via CameraLink or IEEE 1394b WaveSensor® communicates with the WaveMaster® software which provides various ways of analyzing and displaying the wavefront data. Extended data saving allows for further external data processing of all measurement and analysis results. In addition theoretical data is loaded and compared in real time during measurements.

The sensors are well proven as they are used in the WaveMaster® instruments which for example are employed in laboratories, institutes or wafer industry.



Wavemaster LAB
  Unit WaveSensor® 150 WaveSensor® 100 WaveSensor® 80 WaveSensor® 60
Detection area   5/4" 5/4" 2/3" 1/2"
Aperture dimensions mm 15 x 15 15 x 15 6,6 x 8,8 4,8 x 6,4
Number of lenslets   150 x 150 100 x 100 66 x 88 48 x 64
Focus dynamic range λ > 1500 > 1200 > 1000 > 800
Tilt measurement sensitivity µrad < 1 < 1 < 1 < 1
Repeatability RMS < λ/200 < λ/200 < λ/200 < λ/200
Absolute Accuracy RMS < λ/20 < λ/20 < λ/20 < λ/20
Measurement frequency
incl. data procession
Hz 16
12
16
12
16
16
15
15
Wavelength nm 350 - 1100
Interface type   CL Base IEEE 1394b
Dimensions (h x w x d) mm < 74 x 100 x 144
Weight g <1000 <1000 <800 <800

Further detection areas and resolutions are available on request.

 
Read more about MTF measurement and autocollimators.
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