WaveMaster^® PRO

WaveMaster^® PRO and PRO Wafer have been designed to meet the requirements for high volume production testing of imaging systems, single lenses or lenses on wafers.

The instruments provide an accurate, reliable and fast way for automatic production testing. With the combination of a fast, high accuracy wavefront sensor and special positioning algorithms a high throughput is achieved.

WaveMaster^® PRO comes with a tray system in which a high number of single lenses is arranged. In contrast to WaveMaster^® PRO, the WaveMaster^® PRO Wafer comprises of a special tray system for wafers with a diameter of up to 12 inch and an additional tool which determines the wafer orientation in the instrument. The tray systems of both instruments allow for fully automatic positioning of the lenses during the measurement process.

WaveMaster^® PRO and PRO Wafer provide lateral resolved information from design or reference data, scratches and lens impurities within a measurement time of less than three seconds for each single lens under test. This allows for direct feedback into the large volume production process. The production software enhances the capabilities of all WaveMaster^® PRO instruments proving production specific features like pass / fail classification.

Advantages of WaveMaster^® PRO and PRO Wafer

• High throughput due to high measurement speed and fully automatic batch wise or wafer measurement
• High spatial resolution for extremely accurate measurements
• Point light sources with different numerical apertures (up to NA 0.95) and working distances
• Easy loading due to kinematic mount
• Automatic, high precision linear positioning
• Measurement either relative or absolute, allows for comparison with a master lens or design data
• Maximum utilization of the sensor dynamic range with a set of telescopes
• Full functionality of wavefront analysis and detailed analysis of single lenses and wafer lenses
• Production software module, for example with export of pass/fail matrix for use in adjacent production line machines
• Robust and vibration insensitive main frame
• Flange focal length measurement (FFL)
• Wafer bow compensation
• Wafer orientation measurement tool