Specifications
Wavefront sensor
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15 x 15mm² |
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up to 150 x 150 |
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1500 λ |
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500 λ |
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< λ/200 |
- Wavefront measurement absolute (relative) accuracy RMS:
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λ/20 (λ/50) |
- Tilt measurement sensitivity:
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< 1 µrad |
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16Hz |
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350 - 1100 nm |
Laser light source
- 635 nm
- Can be used Collimated ( Øbeam < 25mm, WF accuracy < λ/15 P.V.) or as point light source (up to NA 0.95)
Imaging optics
- For finite as well as infinite measurement set up
- Exchangeable telescopes for several system magnifications
- Exchangeable collimating objectives
5-axis high precision alignment sample holder
- Submicron position adjustment
- Additional tilt contrl and alignment autocollimator
- Fully automatic sample positioning available
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Products > WaveMaster® > Specifications 
