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overview
µPhase® smartgage™ -
the smart solution
for process monitoring ...
The µPhase® smartgage™ is an indispensable and reliable tool for the manufacturing process.
Instant measurement and analysis results let you react immediately to problems occuring during fabrication, leading to an increase in yield and a more effective quality management.
 
 
 
 
 
... at the touch of a button
TRIOPTICS