TriAngle^® UltraSpec

The electronic autocollimators of the TriAngle^® UltraSpec Series represent high-precision angle measurement systems for extremely high demands on angle resolution and measuring accuracy.

Applications include:

• Calibration laboratories
• Semiconductor equipment manufacturing
• High-energy physics
• Laser physics
• Space science

Therefore, TriAngle^® UltraSpec autocollimators are used for high-end measuring, testing and adjustment processes where highest precision and reliability in angle determination are required, for example:

• Adjustment and verification of the straightness of linear stages
• Run-out measurement of rotary tables
• Measurement of large-area surface flatness
• Alignment of optical components
• Alignment of machines and equipment
• Stability studies

Each autocollimator of the TriAngle^® UltraSpec series is calibrated with PTB angle standards and supplied with test certificates and individual calibration curves. Traceability of the measuring results to international standards of the angle measuring variable is consistently ensured.

The mechanically and thermally optimized design of the TriAngle^® UltraSpec is available with the objective focal lengths 300 mm and 500 mm and permits precise and reliable measurements even under difficult conditions. The optical system of the TriAngle^® UltraSpec autocollimators comprises the superbly corrected objective lens of minimum distortion and a highresolution digital CCD camera with extremely low sensor noise. The light source employs a stabilized high power LED illuminating the newly developed sensor system for enhanced angle resolution.

TRIOPTICS offers the TriAngle^® UltraSpec autocollimator as a complete measurement system including a mobile touchscreen control unit with the user-friendly OptiAngle^® software preinstalled.

TriAngle^® UltraSpec Specification

TriAngle^® UltraSpec

TriAngle^® UltraSpec Application