OptiCentric® 300 UltraPrecision Bonding OptiCentric® 600 UltraPrecision Bonding OptiCentric® 800 UltraPrecision Bonding
Air bearing Ø 300 mm Ø 600 mm Ø 800 mm
Centration measurement accuracy* 0.1 µm 0.1 µm 0.1 µm
Alignment accuracy** Better than 2 µm Better than 2 µm Better than 2 µm
Alignment duration*** Approx. 15 s Approx. 15 s Approx. 15 s
Sample height 1000 mm
(On request)
1500 mm
(On request)
1500 mm
(On request)
As an option: center thickness and
air gap measurement
(UltraPrecision Version)
1 µm
(0.15 µm)
1 µm
(0.15 µm)
1 µm
(0.15 µm)
Max sample weight 450 kg 900 kg 1200 kg
Range of radii or EFL ± 5-2000 mm (extendable) ± 5-2000 mm (extendable) ± 5-2000 mm (extendable)
Measuring head Top: C-ACM 500-57
Bottom: C-ACM 300-57
Top: C-ACM 500-57
Bottom: C-ACM 300-57
Top: C-ACM 500-57
Bottom: C-ACM 300-57
Light source High Power Green LED, others on request High Power Green LED, others on request High Power Green LED, others on request

* In stable environment conditions at 100 mm height over the top surface of the air bearing
** Depending on work piece
*** Without glue curing time