OptiCentric®
300 UltraPrecision
OptiCentric®
600 UltraPrecision
OptiCentric®
800 UltraPrecision
Measurement accuracy
in VIS range1)
0.1 µm 0.1 µm 0.1 µm
Sample diameter 400 mm 700 mm 900 mm
Air bearing Ø 300 mm Ø 600 mm Ø 800 mm
Sample height 1000 mm (others on request) 1500 mm (others on request) 1500 mm (others on request)
Max sample weight 450 kg 900 kg 1.200 kg
Measurement heads
for VIS spectral range2)
Top: electronic ACM 500 mm EFL
Bottom: electronic ACM, 300 mm EFL
Top: electronic ACM 500 mm EFL
Bottom: electronic ACM, 300 mm EFL
Top: electronic ACM 500 mm EFL
Bottom: electronic ACM, 300 mm EFL-57**
Light source3) Green high power LED Green high power LED Green high power LED
       
       

1) In stable environment conditions in 100 mm height over the top surface of the air bearing
2) Other electronic autocollimators on request
3) Other on request

Optional

  • Second measurement head beneath the air bearing:
    Setup as OptiCentric® UP Dual
  • Equipped with low-coherence interferometer OptiSurf® for the center thickness measurement:
    Setup as OptiCentric® 3D UP
  • Equipped with IR measurement head:
    Setup as OptiCentric® UP IR 

 

 

Typical scope of delivery

  • OptiCentric® System
  • Rack with controller units and PC
  • Software
  • Monitor
  • Set of head lenses
  • Accessories