Optical set up Infinite-finite conjugates
Max. spatial frequency
600 lp/mm
Accuracy MTF on-axis 1 % MTF (up to 350 lp/mm)
Accuracy MTF off-axis 2 % MTF
Accuracy EFL
(Effective Focal Length)
4 µm
Accuracy FFL
(Flange Focal Length)
5 µm
Measurement
time display on axis
1.5 sec/sample
Measurement
time display all off axis curves
1.5 sec/sample
Throughput of samples
(Units per hour)*
2340 UPH
Measurement points 49 (25 field positions / cameras)
Dimensions
(height x width x depth)
1350 mm x 1330 mm x 805 mm
Weight 210 kg
Sample holder / trays 3 point kinematic mount tray with certified reference flatness
Sample quality classes 4 quality classes
Cleanroom class FS 209 / ISO14644-1 100 / ISO 5

* 10 seconds for changing trays, 1 tray includes 148 samples