ImageMaster®
PRO 5 Wafer
Optical set up Infinite-finite conjugates
Max. spatial frequency 400 lp /mm
Accuracy MTF on-axis 1,5 % MTF
Accuracy MTF off-axis 2,5 % MTF
Accuracy EFL
(Effective Focal Length)
5 µm
Accuracy FFL
(Flange Focal Length)
4 µm (by distance sensor)
Minimum measurement time 1.0 sec / sample
Average measurement time 2.5 sec / sample
Dimensions
(height x width x depth)
1350 mm x
1330 mm x
675 mm
Weight 210 kg
Sample holder Wafer tray
Cleanroom class FS 209 / ISO14644-1 100 / ISO 5