ImagesMaster® PRO 5 Wafer - MTF Measurement of Wafer Level Optics

ImageMaster® PRO 5 Wafer measurement chamber
ImageMaster® PRO 5 Wafer measurement chamber

The Image Master® PRO 5 Wafer has been designed to meet the requirements of quality assurance within the production of the new generation of wafer level objective lenses i.e. for mobile phone/digital cameras or automotive sensors that are manufactured in large quantities on wafers. Optical wafers of any size up to a diameter of 8 inch (200 mm) and thousands of miniature lenses or objectives can be tested and qualified in one fully automatic test run at high speed. The ImageMaster® PRO 5 Wafer instrument is fully automated and prepared for measurement of lenses on circular wafers or single lenses that are arranged in a tray.

Key Features

  • Fastest measurement (less than 1 sec. per lens) of MTF in fixed image plane position
  • Highest FFL accuracy for spacer thickness determination
  • Tilt correction function (bow compensation)
  • Measurement traceable to international standards
  • Wafer bow measurement
  • Max wafer diameter up to 8 inch (200 mm)
    (on request 12inch 300mm)
  • Quick, software-controlled wafer alignment
  • Data processing for next production steps
  • Operation status light indicator
  • Easy loading due to kinematic mount and wafer rotation and shift adjustment tool
  • An assortment of pass and fail criteria allows use of the most suitable criterion for each type of lens
  • Cleanroom compatibility ISO 5

Applications

ImageMaster® PRO 5 Wafer MTF measurement of wafer level optics:

  • MTF on and off axis
  • Effective Focal Length (EFL)
  • Flange Focal Length (FFL)
  • Field curvature
  • Depth of focus
  • Chromatic aberrations
  • Astigmatism
  • Relative distortion