Optical setup Infinite-finite conjugates
Max. spatial frequency 400 lp/mm
Accuracy MTF on-axis 1.5 % MTF (up to 300 lp/mm)
Accuracy MTF off-axis 2.5 % MTF
Accuracy EFL
(Effective Focal Length)
5 µm
Accuracy FFL
(Flange Focal Length)
6 µm
Measurement time display on axis 1.8 sec/sample
Measurement time display all off axis curves 3.5 sec/sample
Throughput of samples
(Units per hour)*
1960 UPH
Measurement points 33 (17 field positions / cameras)
Dimensions
(height x width x depth)
1350 mm x 1330 mm x 675 mm
Weight 210 kg
Sample holder / trays 3 point kinematic mount tray
Sample quality classes 4 quality classes
Cleanroom class FS 209 / ISO14644-1 100 / ISO 5

* 10 seconds for changing trays, 1 tray includes 148 samples