µPhase® 500 / 1000 - Most Flexible Interferometer Sensors

µPhase® is available in different wavelenghts
µPhase® is available in different wavelenghts

These highly integrated phase-shifting Twyman-Green interferometer sensors meet the toughest demands for modern quality management. In combination with the μShape™ measuring and analysis software these high-performance precision measuring instruments provide information about the specimen's surface deviation or wave front aberration.

Key Features

µPhase® integrated into a turning machine
µPhase® integrated into a turning machine
  • Fast and non-destructive single-shot measurements
  • High resolution camera
  • Easy adaption to different sample reflectivities (µPhase® 1000 only)
  • Ability to focus on sample surface (µPhase® 1000 only)
  • Second Camera for alignment
  • Compact size and modularity
  • Robust, dust-proof housing
  • Integration in production machines and production lines easily possible
  • Standard measuring wavelength 632.8 nm;
    customized versions measuring at wavelengths
    from 355 nm to 1064 nm on request
  • Well-structured and comprehensive software supports both production and laboratory use