To adapt to different hardware configurations e.g. different reticle patterns (bright cross, dark cross, pinhole, etc.), the software features selectable options. Further options enable to select different measurement units: mm/inch, arsec, microrad, etc. To increase the efficiency in the production process, the software allows to save the optimized process parameter for future use.
Further features of the software:
Real time, continuous display of the measurement value
Vector display of the size and direction of the centration error
Computer generated single cross for the initial alignment
Computer generated tolerance circles or angle graduations for quick checking of production quantities
Automatic sensitivity control i.e. automatic adjustment
to the sample reflectivity
Automatic calibration procedure by means of a calibrated sample.
The calibration can be checked at customer site. The measurement certificate includes besides the data according to the standard DIN 3140 (surface tilt angle) the radius of the decentration circle. The statistic evaluation of the data and the records of the measurement parameters complete the information contained in the measuring certificate. For further processing the measurement data can be exported to text or spread sheet processing programs. |