Mikrolithography

Typical applications for TRIOPTICS products:


 

Centration, Center Thickness and Air Gap Measurement of Large Optics

OptiCentric® MAX UP

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Lens Assembly and Bonding of Large Optics

OptiCentric® MAX UP Bonding

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High Precision Center Thickness and Air Gap Measurement within Stepper-Optics

OptiSurf®

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Alignment turning of High Precision Mounted Lenses for Stepper-Optics

ATS 200 & ATS 400

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Measurement of Refractive Indices for Microlithography Optics

SpectroMaster® | PrismMaster®

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