µPhase^® Software

General Functions of the μShape™ Measuring and Analysis Software

• Different levels with different access rights
• Shortcuts for most used program functions
• Comprehensive context-sensitive online help
• Various program modes enable the separate visualization of calibration and measuring processes and its parameters with an integrated live camera image
• Automatic updates of displays and images after every change of analysis parameters and new measurement
• Easily pre-configured templates for a wide range of measuring tasks and analyses
• Storage of all parameters and settings, including window size and position, with specimen data in μShapeTM program file
• Graphic windows can be stored in several graphic formats (bmp, jpg,..)
• Export of individual parameters or of selected data fields as text, binary or other common file formats (e.g. QED, Zygo XYZ, DigitalSurf) for external processing
• The measurement results are presented in parameters or graphically as a cross section, in 2D or 3D
• Printout of selected graphic displays or of the entire window
• Measurement protocol shows the results at a glance and can be widely configured including the customer`s logo
• Access protection and configuration of add-on modules by dongle

Basic Measuring and Calibration Settings of μShape™ Software

• Measuring parameters
  Sets measuring parameters for any given measuring configuration: choice of phase measurement method, phase computation, and phase-shift wait times, separately for calibration and measurement of specimen.
  
  
• Wavefront parameters
  This function sets all parameters necessary for the computation of wavefronts, such as subtraction of calibration data; activation of various smoothing and holeclosing methods; compensation of adjustment errors for flat, spherical, cylindrical, aspherical and toric specimen; and geometrical operations (rotation, mirroring and data-field shift).
  
  
• Masks
  Sets geometrical elements (circles, ellipses, rectangles, squares and polygons) in any combination as transparent or opaque masks
  
  
• Configuration
  Selects test setups, such as measurement of surfaces in perpendicular reflection, wavefronts in double transmission, automatic conversion of results and scaling of the measured field in units of length.
  
  
• Visualization
  Graphic display of data fields (intensity, phase image, measured data) displayed as a cross-section, 2D or 3D image. All parameters and statistical values in table form. Display of statistics, DIN and ISO parameters, Zernike and Seidel coefficients is available.

μShape™ Add-On Modules

For extended measurement tasks and further analysis the μShape™ software offers a great variety of add-on modules which can be added by the user if needed. Among these are:

• Analysis of aspherical surfaces in spherical or CGH setups
• Analysis of cylindrical or toric surfaces
• External communication interface for controlling the interferometer by external programs, e.g. in an automated system
• Measuring of homogeneity of glass plates
• MTF analysis of focal or afocal optical components and systems
• Measuring multiple apertures in one shot, e.g. on polishing heads
• Statistical analysis of multiple sub-apertures at the same time
• Prism and wedge measurement and analysis
• Considering known sample deviations e.g. deviations caused by the optical design
• Analysis of the tool offset of lathe machines
• Analysis of wafer plates
• Roughness and PSD analysis
• Static fringe analysis for fast measurements in instable environments

Special μShape™ versions

In case were the powerful μShape™ Professional software does not meet the customers' needs TRIOPTICS offers special and customized software solutions.

μShape™ FastFringe Software

The FastFringe Software is designed for interferometers without phase-shifters. The measurement results are calculated by a static fringe analysis from a single interferogram. The analysis features are very similar to the μShape™ Professional with only a few exceptions not useful for non-shifting setups.

μShape™ Customized Software

The Customized version is an individual version of the Professional Software, which is specifically designed and created for special customer needs. A variety of add-on modules are available, enabling to extend the functions of the software.

Customized analysis and display functions, add-on modules or exclusive modules for customer specific measuring tasks are provided with the customized version of the software.

μShape™ Generic Software Package for Third-Party Interferometers

The μShape™ Generic Package can be used with the majority of commercial phase-measuring interferometers or individual interferometer setups.

Each package includes drivers for nearly all kinds of camera interfaces and optionally a piezo-element preamplifier. Contact TRIOPTICS for further details and an offer tailored to your needs.