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Specification ImageMaster® Production Line
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ImageMaster®
PRO 5 |
ImageMaster®
PRO 5 Wafer |
ImageMaster®
SMART PRO 5 |
| Optical set up |
Infinity-finite conjugates |
Infinity-finite conjugates |
Infinity-finite conjugates |
| Spatial frequency |
0 ... 300 lp/mm |
0 ... 300 lp/mm |
0 ... 200 lp/mm |
Accuracy
MTF on-axis |
2% MTF |
2% MTF |
3% MTF |
Accuracy
MTF off-axis |
3% MTF
|
3% MTF |
5% MTF |
Accuracy EFL (Effective
Focal Length) |
5µm |
5µm |
5µm |
Accuracy FFL (Flange
Focal Length) |
8µm |
4µm |
8µm |
Minimum measurement
time |
1,2 Sec |
1 Sec |
5 Sec |
Average measurement
time |
2,8 Sec |
2,1 Sec |
8 Sec |
Dimensions (height x
width x depth) |
1350 x 1330 x 660 mm |
1350 x 1330 x 660 mm |
1230 x 730 x 600 mm |
| Weight |
180 Kg |
190 Kg |
130 Kg |
| Sample holder |
Tray with multiple sample
seats (3 quality versions) |
Wafer tray |
Single seat |
Clean room class
FS 209
ISO14644-1 |
100
ISO 5
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100
ISO 5
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10 000
ISO 7 |
ImageMaster® Compact PRO
| Accuracy MTF on-axis |
2 % MTF (traceable) |
| Accuracy MTF off-axis |
4 % MTF |
| Measurement time/sample |
4 sec. |
| Resolution |
0,01" |
| Measurement time all Through Focus Curves /sample |
8 sec. |
| Measurement parameters |
MTF on-axis, MTF off-axis, trough focus curves, effective
focal length, flange focal length, depth of focus,
tilt of image plane, azimuth of image plane, field curvature,
astigmatism, relative optical distortion |
| Light source |
white LED (halogen optional) |
| Filter |
VIS (NIR Optional) |
| Stage accuracy (x,y,z) |
2 μm |
| System alignment |
Autocollimator optional (one for every customer) |
| Type of instrument |
Table top device with PC and monitor / table optional |
| Sample holder: travel |
Tray 140mm x 140mm |
| Dimensions (width × height × depth) |
650 mm × 682 mm × 610 mm |
| Weight |
90 kg |
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Products > ImageMaster® > Specification > ImageMaster® Production Line 