Motorized finite conjugates stage for long conjugate distances
An additional linear stage with a target generator consisting of a reticle changer and illumination unit is optionally available for the finite-finite imaging configuration. For operator convenience the distance setting of the conjugate distances is motorized. The distance setting for a certain sample can be saved to a file and used for future measurements.
The finite conjugates assembly features both long conjugate distances (up to 1 m) and very large object height (standard +/-500 mm, as special version up to +/-1 m).
High quality image analyzer
The centerpiece of ImageMaster® HR is the high-quality image analyzer including relay optics of negligible residual aberrations, selected and tested CCD camera and perfectly aligned optical head assemblies.
The high-quality image analyzer with an exchangeable high-NA microscope relay lens is located beneath the sample table. It is mounted on precision motorized linear stages for focus and image field positioning. For the ultra precise distortion and EFL measurement the object generator arm and the image field stage can be optionally equipped with precision encoders assuring the accurate position feedback needed in these measurements.
Precision Sample holder
The measurement accuracy of a MTF-Test Station is significantly influenced by the quality and stability of the sample holder. The sample holder integrated in ImageMaster® HR includes an ultra accurate rotary bearing, precision reference surfaces square and parallel to the optical axis, rotation facilities over 360° and fine adjustment in X, Y direction. The rotation of the sample holder is alternatively available in manual or software controlled motorized version.
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